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Latest Publications & Patents on MEMS

MEMS

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This is our latest selection of worldwide publications and patents in english on MEMS, between many scientific online journals, classified and focused on MEMS.

Mems switch, packaged mems switch product and method of operating it

Patent published on the 2026-05-13 in EP under Ref EP4742289 by INFINEON TECHNOLOGIES AG [DE] (Timme Hans-jÖrg [de], Lohninger Gerhard [de], Ahrens Carsten [de])

Abstract: In accordance with an embodiment, a microelectromechanical system (MEMS) switch device includes: a substrate; a switching membrane disposed above the substrate; a pull-in electrode disposed above the switching membrane; a metal contact disposed on the switching membrane; and a pull-back electrode disposed below the switching membrane, wherein the switching membrane is movable between an open position and a closed position, and wherein in the closed position, the metal contact electrically connec[...]


Our summary: A MEMS switch device consists of a substrate, a movable switching membrane, and electrodes. The switch operates by moving the membrane between open and closed positions. In the closed position, the metal contact connects two RF signal lines.

MEMS switch, microelectromechanical system, RF signal lines, switching membrane

Patent

A method of manufacture of a micro-electric-mechanical system with a beam structure

Patent published on the 2026-05-13 in CZ under Ref CZ2024508 by FYZIKALNI USTAV AV CR V V I [CZ] (Kromka Alexander [cz], PotockÝ ŠtĚpÁn [cz], SzabÓ Ondrej [cz], Vanko Gabriel [cz])

Abstract: The submitted solution applies to the method of manufacture of a micro-electric-mechanical system (MEMS) with a beam structure which includes the following steps: providing a substrate; depositing a sacrificial layer of silicon dioxide or silicon nitride on the substrate; cutting or etching a part in the sacrificial layer to support the beam structure using a laser-assisted machining, wet etching or dry etching whereas the sacrificial layer is removed as far as the substrate; depositing a diamon[...]


Our summary: This method manufactures a micro-electric-mechanical system (MEMS) with a beam structure. It involves depositing a sacrificial layer, etching to support the beam, and using laser techniques for precision. The process ensures high quality and durability of the MEMS components.

MEMS, beam structure, laser-assisted machining, sacrificial layer

Patent

Mems device and manufacturing method therefor, and method for reading output signal of mems device

Patent published on the 2026-05-07 in WO under Ref WO2026092443 by WUXI CHINA RESOURCES MICROELECTRONICS CO LTD [CN] (Jin Yi [cn], Li Shaoping [cn], Gao Duoduo [cn], Rong Genlan [cn], Zhu Encheng [cn], Jin Wenchao [cn], Yang Guoqing [cn], Yan Kai [cn], Wang Jie [cn], Dong Yang [cn], Zhang Bing [cn])

Abstract: The present application provides a MEMS device and a manufacturing method therefor, and a method for reading an output signal of the MEMS device. The MEMS device comprises: a first substrate, wherein a back cavity is formed in the first substrate; a first movable film layer, a first isolation layer, a first fixed electrode layer, a second isolation layer, a third movable film layer, a fifth isolation layer, a fourth movable film layer, a fourth isolation layer, a second fixed electrode layer, a [...]


Our summary: The document describes a MEMS device with multiple layers and cavities. It details the manufacturing method for the device. Additionally, it outlines a method for reading the output signal from the MEMS device.

MEMS, manufacturing method, output signal, substrate

Patent

Two-step laser processing for producing a mems chip comprising an environmental barrier structure made from polymer nanofibers

Patent published on the 2026-05-06 in EP under Ref EP4737388 by INFINEON TECHNOLOGIES AG [DE] (Anzinger Sebastian [de], Wasisto Hutomo Suryo [de], Maier Dominic [de], Sotnikov Anatoly [de], FÜldner Marc [de])

Abstract: A method for producing a MEMS chip with an environmental barrier structure made from polymer nanofibers, the method comprising providing a wafer substrate having plurality of adjacent through holes (131,..., 134). The environmental barrier structure is created by applying polymer nanofibers onto one of the front and back sides (111, 112) of the wafer substrate. A plurality of MEMS chips are singulated from the wafer substrate by applying a two-step laser process comprising: a first laser-process[...]


Our summary: A method for producing a MEMS chip involves applying polymer nanofibers to a wafer substrate with through holes. A two-step laser process is used to remove the nanofibers and uncover surfaces. The final step involves stealth dicing to singulate the MEMS chips.

MEMS chip, polymer nanofibers, laser processing, environmental barrier

Patent

Multi-cell piston motion membrane microelectromechanical systems (mems) apparatus and process

Patent published on the 2026-04-16 in US under Ref US20260103377 by INVENSENSE INC [US] (Akiyama Jotaro [jp], Shibano Yuki [jp], Arimatsu Daishi [jp], Kaneko Kento [jp])

Abstract: Multi-cell piston motion membrane microelectromechanical systems (MEMS) apparatuses and processes are described. Described MEMS sensors or devices can comprise a patterned piston motion membrane array wherein each cell of the patterned piston motion membrane array is connected to at least one other cell of the patterned piston motion membrane array. In addition, MEMS sensors or devices can comprise a patterned transduction membrane array wherein each cell of the patterned transduction membrane a[...]


Our summary: Multi-cell piston motion membrane MEMS apparatuses enable interconnected cell designs. These devices feature patterned arrays for enhanced design flexibility and performance. Improvements lead to efficient die usage, high signal-to-noise ratio, and increased resonance frequency.

MEMS, piston motion, microelectromechanical systems, transduction membrane

Patent

Beam aiming and/or detecting with mems mirror

Patent published on the 2026-04-15 in EP under Ref EP4726457 by BEAMAGINE S L [ES] (Royo Santiago [es], Riu Jordi [es], GarcÍa-gÓmez Pablo [es], Bas Isidro [es], GimÉnez Sara [es])

Abstract: A computer-implemented method comprising: controlling at least one light source to emit at least one light beam; controlling at least one mirror to scan the at least one light beam in a first direction; and controlling a microelectromechanical system, MEMS, mirror that the at least one light beam impinges on and directs towards the at least one mirror, wherein the MEMS mirror is controlled to modify how the at least one light beam impinges on the at least one mirror to further scan the at least [...]


Our summary: The method involves controlling a light source to emit a beam and a mirror to scan it in one direction. A MEMS mirror modifies the beam s direction to enable scanning in a second, non-parallel direction. The approach includes both an apparatus and a method for beam aiming and detection.

MEMS, light beam, scanning, control

Patent

Real-Time Axle-Load Sensing and AI-Enhanced Braking-Distance Prediction for Multi-Axle Heavy-Duty Trucks

Published on 2026-02-03 by Duk Sun Yun, Byung Chul Lim @MDPI

Abstract: Accurate braking-distance prediction for heavy-duty multi-axle trucks remains challenging due to the large gross vehicle weight, tandem-axle interactions, and strong transient load transfer during emergency braking. Recent studies on tire&amp;ndash;road friction estimation, commercial-vehicle braking control (EBS/AEBS), and weigh-in-motion (WIM) sensing have highlighted that unmeasured vertical-load dynamics and time-varying friction are key sources of prediction uncertainty. To address thes[...]


Our summary: This study presents a framework for real-time axle-load sensing and AI-enhanced braking-distance prediction for heavy-duty trucks. It integrates dynamic load estimation with friction sensing and machine learning to improve prediction accuracy. The results show significant enhancements in braking-distance predictions compared to traditional methods, supporting advanced driver-assistance and safety management systems.

Axle-Load Sensing, Braking-Distance Prediction, Machine Learning, Heavy-Duty Trucks

Publication

Investigation of III-Nitride MEMS Pressure Sensor for High-Temperature Applications

Published on 2026-01-28 by Makhluk Hossain Prio, Maruf Morshed, Lavanya Muthusamy, Md Sohanur E. Hijrat Raju, Itmenon Towfeeq, Durga Gajula, Goutam Koley @MDPI

Abstract: High-temperature operation of AlGaN/GaN Heterojunction Field Effect Transistor embedded diaphragm-based MEMS pressure sensors have been investigated, which utilized their wide bandgap and piezo resistivity to perform stably at elevated temperatures. The performance of the pressure sensor was observed over a change in applied pressure of 35 kPa, which resulted in an experimentally measured change in drain&amp;ndash;source resistance (&amp;Delta;RDS/RDS(0)) of 0.32% at room temperature and[...]


Our summary: The study investigates a MEMS pressure sensor using AlGaN/GaN transistors for high-temperature applications. The sensor shows stable performance at temperatures up to 300 °C with a change in resistance of 0.65% at 250 °C. Finite Element simulations corroborate experimental results, indicating strong potential for reliable pressure sensing in harsh environments.

MEMS, III-Nitride, High-Temperature, Pressure Sensor

Publication

Topics covered: diagnosing, digital MEMS microphone, abnormality, apparatus, Finite Element Analysis, Soft-Pad Moldless Stamping, Bistable Circular Micro Shells, Microfabrication, Cavity-SOI, micromachining, resonant pressure sensors, MEMS Pirani vacuum gauge, porous silicon, synchronization, large-aperture, electromagnetic, tensile testing, ASTM F2630, ISO 16063, IEC 62047, ISO/IEC 27001, and ISO 9001..

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