Latest Publications & Patents on MEMS

MEMS

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This is our latest selection of worldwide publications and patents in english on MEMS, between many scientific online journals, classified and focused on MEMS.

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    Topics covered: diagnosing, digital MEMS microphone, abnormality, apparatus, Finite Element Analysis, Soft-Pad Moldless Stamping, Bistable Circular Micro Shells, Microfabrication, Cavity-SOI, micromachining, resonant pressure sensors, MEMS Pirani vacuum gauge, porous silicon, synchronization, large-aperture, electromagnetic, tensile testing, ASTM F2630, ISO 16063, IEC 62047, ISO/IEC 27001, and ISO 9001..

    Historical Context

    (if date is unknown or not relevant, e.g. "fluid mechanics", a rounded estimation of its notable emergence is provided)

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