Latest Publications & Patents on MEMS

This week: Electrostatic actuation, MEMS, voltage signal, LC tank circuit, MEMS, Gas Sensor, γ-Fe2O3, Propane, diagnosing, digital MEMS microphone, abnormality, apparatus, Finite Element Analysis, Soft-Pad Moldless Stamping, Bistable Circular Micro Shells, Microfabrication, Cavity-SOI, MEMS, micromachining, resonant pressure sensors, MEMS, Sensor Arrays, Optimization, Feature Alignment, MEMS, Pirani, Vacuum Gauge, Porous Silicon, acoustic devices, edge corrugation, piezoelectric MEMS microphone, cantilever beams

August 30, 2025

Design for Additive Manufacturing (DfAM), Mechanical Engineering, Mechanical Properties, Micro-electromechanical Systems (MEMS), Micromachining, Process Optimization, Quality Control, Sensors

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This is our latest selection of worldwide publications and patents in english on MEMS, between many scientific online journals, classified and focused on MEMS.

Publication: no recent news on this particular topic. Please try the extensive manual search in the Publication Database linked just above.

Patents: no recent patent on this particular topic. Please try the extensive manual search in the Patents Database linked just above.

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Topics covered: diagnosing, digital MEMS microphone, abnormality, apparatus, Finite Element Analysis, Soft-Pad Moldless Stamping, Bistable Circular Micro Shells, Microfabrication, Cavity-SOI, micromachining, resonant pressure sensors, MEMS Pirani vacuum gauge, porous silicon, synchronization, large-aperture, electromagnetic, tensile testing, ASTM F2630, ISO 16063, IEC 62047, ISO/IEC 27001, and ISO 9001..