Hocheffiziente Partikelluftfilter (HEPA) und Ultra-Low Particulate Air (ULPA)-Filter sind von entscheidender Bedeutung. Reinraum components. A HEPA filter muss remove at least 99.97% of airborne particles 0.3 micrometers (µm) in diameter. An ULPA filter is even more efficient, removing 99.999% of particles 0.12 µm or larger. They work via a combination of interception, impaction, and diffusion.

















