高效微粒空气过滤器 (HEPA) 和超低微粒空气过滤器 (ULPA) 至关重要 洁净室 components. A HEPA filter 必须 remove at least 99.97% of airborne particles 0.3 micrometers (µm) in diameter. An ULPA filter is even more efficient, removing 99.999% of particles 0.12 µm or larger. They work via a combination of interception, impaction, and diffusion.

















