고효율 미립자 공기(HEPA) 필터와 초저 미립자 공기(ULPA) 필터는 필수적입니다. 클린룸 components. A HEPA filter ~ 해야 하다 remove at least 99.97% of airborne particles 0.3 micrometers (µm) in diameter. An ULPA filter is even more efficient, removing 99.999% of particles 0.12 µm or larger. They work via a combination of interception, impaction, and diffusion.

















