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化学气相沉积(CVD)领域的最新出版物和专利

化学气相沉积

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化学气相沉积
化学气相沉积法通过气相反应制备高质量薄膜,可应用于先进材料和半导体领域。 制造业.

化学气相沉积(CVD)是一种主要的薄涂层技术。 电影 该领域是一种制造技术,涉及气相前驱体在加热基底上的化学反应,以生产高纯度、保形涂层,并对厚度和成分进行精确控制。该领域整合了前驱体化学、气流动力学、表面反应和特殊反应器环境下的热管理之间的相互作用。其应用范围包括半导体器件制造、保护涂层和先进材料合成。以下汇编介绍了经同行评审的最新出版物和专利,反映了反应器设计、前驱体开发、工艺优化以及新型 CVD 模式(如等离子体增强型和金属有机 CVD)方面的进展。.

这是我们最新精选的有关化学气相沉积 (CVD) 的全球出版物和专利,这些出版物和专利来自众多科学在线期刊,分类并侧重于 CVD、化学气相沉积、薄膜沉积、前驱气体、基底加热、沉积速率、薄膜均匀性、气流动态、表面反应、成核、薄膜生长机制、热 CVD、等离子体增强 CVD、金属有机 CVD、原子层沉积、ALD、沉积温度、载气、薄膜厚度控制、保形性、沉积压力、化学前驱体、薄膜形态、沉积动力学、气相反应、表面扩散、CVD 反应器和沉积选择性。.

Improved acrylic acid production process with increased product purity

Patent published on the 2026-06-11 in WO under Ref WO2026122320 by ROHM AND HAAS CO [US] (Quiros Nelson I [us])

Abstract: A process for producing acrylic acid comprises feeding a stream comprising acrylic acid to a dehydration tower to produce an overhead stream comprising noncondensibles and lights and a bottoms stream comprising acrylic acid and Michael addition products of acrylic acid. At least a portion of the bottoms stream from the dehydration tower is fed to a finishing tower to distill the bottoms stream of the dehydration tower to produce an acrylic acid-rich stream comprising acrylic acid and organic car[...]


Our summary: The process enhances acrylic acid production with higher purity. It utilizes a dehydration tower and a finishing tower for separation. The final step involves crystallization to achieve glacial acrylic acid with minimal impurities.

acrylic acid, purification, distillation, crystallization

Patent

Methods for hydrogen sulfide scavenging

Patent published on the 2026-06-11 in US under Ref US20260158432 by HEXION INC (Lindeman Jeffrey [us], Kamoun Cyrille [us], Lefenfeld Michael [us])

Abstract: [0000] Disclosed is a process for scavenging HS from a process stream by contacting an HS-containing process stream with a scavenging composition containing 35 to 70 wt. % formaldehyde, 10 to 55 wt. % methanol, 5 to 20 wt. % water, and up to 10 wt. % additives, selected from a defoamer, a corrosion inhibitor, a scale inhibitor, a pH adjuster, or mixtures thereof. Scavenging compositions with such a formulation are also described.[...]


Our summary: A process is disclosed for scavenging hydrogen sulfide from a process stream. The scavenging composition consists of formaldehyde, methanol, water, and optional additives. The formulation aims to effectively reduce hydrogen sulfide levels in various applications.

hydrogen sulfide, scavenging composition, formaldehyde, methanol

Patent

Rigid carrier assemblies with conductive modifiers added to injection molding polymers for improved electrostatic discharge

Patent published on the 2026-06-04 in WO under Ref WO2026117766 by DAEWON SEMICONDUCTOR PACKAGING INDUSTRIAL CO [US] (Hermsmeier Brent Dae [us], Chung Sunna [us], Cho Kyung Hee [us], Cabornay Jilian [us], Hwang Yu Jin [us], Jentgen Jarrod [us], Jeong Sang Yoon [us], Lee Si Chang [us], Nemeckova Petra [us], Okoren Athens [us], Oh Se Don [us])

Abstract: A carrier assembly for semiconductor components can include a patterned tray composed of carbon nanotubes – having disentangled conductive modifiers – that substantially conforms to the pattern. By aligning the disentangled conductive modifiers (e.g., using a chemical vapor deposition process, sonication, and/or a strong magnet) in a vertical arrangement, more consistent and effective discharge of static electricity can be achieved. When semiconductor components are loaded into the patterned[...]


Our summary: Rigid carrier assemblies enhance electrostatic discharge in semiconductor components. Conductive modifiers are integrated into polymers using advanced techniques. Vertical alignment of these modifiers improves static electricity discharge efficiency.

conductive modifiers, electrostatic discharge, carbon nanotubes, injection molding

Patent

Binder composition with extended shelf-life

Patent published on the 2026-06-04 in US under Ref US20260152662 by PAROC GROUP OY [FI] (Chen Liang [us], Pettersson Charlotte Carita [fi], Mueller Gert [us], Zhang Xiujuan [us])

Abstract: A fibrous insulation product with an extended uncured shelf life is disclosed comprising a plurality of randomly oriented fibers and a binder composition at least partially coating the fibers. The binder composition has a complex modulus at ambient temperature of no greater than 0.0004 MPa at a binder solids content of between 65% and 85%. The binder composition is free of added formaldehyde and is applied to the fibers as an aqueous binder composition comprising at least 20% by weight of a reac[...]


Our summary: The disclosed fibrous insulation product features a binder composition with an extended uncured shelf life. The binder has a complex modulus of no greater than 0.0004 MPa and is free of added formaldehyde. It comprises a reactive diluent polyol and a polymeric crosslinking agent, ensuring effective coating of the fibers.

Binder composition, Fibrous insulation, Extended shelf-life, Aqueous binder

Patent

Substrate processing apparatus, substrate heating method, and method for producing semiconductor device

Patent published on the 2026-06-04 in WO under Ref WO2026115695 by KOKUSAI ELECTRIC CORP [JP] (Fujimori Hiroki [jp], Ueno Masaaki [jp])

Abstract: Provided is a technique for heating a substrate so as to equalize the temperature of the substrate. The present invention comprises a heat insulator including a heat storage material disposed in the vicinity of a substrate accommodated in a reaction container configured to be heated to a predetermined temperature, wherein the heat storage material is configured such that, when the melting point of the heat storage material is higher than the predetermined temperature, the heat storage material[...]


Our summary: The invention describes a substrate heating method to achieve uniform temperature distribution. It utilizes a heat insulator with a heat storage material near the substrate. The heat storage material changes state based on its melting point relative to the predetermined temperature.

substrate processing, substrate heating, semiconductor device, heat insulator

Patent

Tpu with low self-nucleation

Patent published on the 2026-06-04 in WO under Ref WO2026114869 by BASF SE [DE] (Poeselt Elmar [de], Schander Edgar [de], Schaefer Frank [de], Mattfeld Sascha [de], Uhlhorn Frank [de])

Abstract: The present invention relate to a thermoplastic polyurethane (TPU-1) obtained or obtainable from a polyol composition (PC) and an isocyanate composition (IC), wherein (TPU-1) is characterized by a specific crystallization behavior measured using dynamic scanning calorimetry (DSC) according to DIN EN ISO 11357-3:2013. The present invention furthermore is directed to a process for preparing an article from said thermoplastic polyurethane as well as the use of a thermoplastic polyurethane according[...]


Our summary: The invention describes a thermoplastic polyurethane (TPU-1) with low self-nucleation derived from specific polyol and isocyanate compositions. It features unique crystallization behavior as measured by dynamic scanning calorimetry. Additionally, the invention includes a method for producing articles from this TPU and its application in creating shaped articles, such as films.

TPU, self-nucleation, thermoplastic polyurethane, crystallization

Patent

Heralded linear optical generation of Dicke states

Published on 2026-04-30 by Minhyeok Kang, Jaehee Kim, William J Munro, Seungbeom Chin and Joonsuk Huh @IOP SCIENCE

Abstract: Entanglement is a fundamental feature of quantum mechanics and a key resource for quantum information processing. Among multipartite entangled states, Dicke states are distinguished by their permutation symmetry, which provides robustness against particle loss and enables applications for quantum communication and computation. Although Dicke states have been realized in various platforms, most optical implementations rely on postselection, which destroys the state upon detection and prevents its[...]


Our summary: This work presents a linear-optical heralded scheme for generating arbitrary Dicke states using photons. The approach leverages the permutation symmetry of Dicke states to simplify the generation process. This method offers a resource-efficient pathway for practical applications in quantum technologies.

Dicke states, quantum entanglement, linear optics, heralded generation

Publication

The Effect of Post-Heat Treatments on Microstructure and Mechanical Properties of a L-PBF CoCrNi&ndash;AlTi Medium-Entropy Alloy

Published on 2026-02-03 by Xiaojing Xiong, Xiaodong Nong, Libin Yu, Xianzhao Meng, Chunjia Mo, Yunjie Bi, Hui Ding @MDPI

Abstract: A CoCrNi-AlTi medium-entropy alloy was fabricated via laser powder bed fusion (L-PBF), and its microstructural evolution and mechanical response during aging at 500&amp;ndash;900 &amp;deg;C for 1 h were systematically investigated. The as-built alloy exhibits a hierarchical microstructure consisting of elongated columnar grains and dislocation-rich cellular substructures, which is associated with an excellent strength&amp;ndash;ductility combination (YS: 848 MPa, UTS: 1136 MPa, EF: 3[...]


Our summary: The study investigates the effects of post-heat treatments on the microstructure and mechanical properties of a CoCrNi-AlTi medium-entropy alloy fabricated via laser powder bed fusion. Aging at temperatures between 500-900 °C enhances hardness and tensile strength, with peak performance noted at 800 °C. The research highlights the role of L-PBF-induced defect structures in influencing precipitation behavior and the strength-ductility trade-off during heat treatment.

L-PBF, CoCrNi-AlTi, microstructure, mechanical properties

Publication

涵盖的主题: 化学气相沉积、薄膜制造、气相反应、高纯度涂层、保形涂层、前驱体化学、气流动力学、表面反应、热管理、半导体制造、反应器设计、工艺优化、等离子体增强型 CVD、金属有机 CVD、先进材料合成、同行评审出版物、专利 ISO 14644、ASTM E2871、SEMI C3、IEC 61000 和 ISO 9001。.

常用术语表

Chemical Vapor Deposition (CVD): 通过气态前体的化学反应,在基材上形成薄膜或涂层,最终沉积固体材料的工艺。该工艺常用于半导体制造和材料科学。

历史背景

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(如果日期未知或不相关,例如“流体力学”,则提供其显著出现的近似估计)

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