Home » Cleanroom Airflow Principles: Laminar and Turbulent Flow

Cleanroom Airflow Principles: Laminar and Turbulent Flow

1960
Cleanroom airflow systems demonstrating laminar and turbulent flow principles in semiconductor applications.

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Cleanrooms utilize two primary airflow principles to control contamination. Turbulent (or non-unidirectional) flow involves mixed air streams, suitable for less stringent classes (ISO 6-9). Laminar (or unidirectional) flow uses parallel, constant-velocity air streams to sweep particles out of the environment, essential for high-purity applications like ISO 1-5, preventing cross-contamination and ensuring rapid particle removal.

The choice between turbulent and laminar airflow is a fundamental design decision in cleanroom engineering, driven by the required cleanliness level and cost constraints. Turbulent flow rooms, the more conventional design, supply HEPA-filtered air from ceiling-mounted diffusers. The air enters the room, mixes with the existing air, and removes contaminants as it exits through low-level exhausts. While effective for many applications, the random air currents can create eddies where particles may linger or settle.

In contrast, laminar flow, also known as unidirectional flow, creates a predictable, uniform movement of air. In a vertical laminar flow room, the entire ceiling is composed of HEPA or ULPA filters, and the air travels straight down to a perforated raised floor, acting like a massive, slow-moving piston that pushes particles out. This design provides the highest level of air cleanliness by minimizing the time a particle can remain airborne and preventing lateral movement of contaminants. Horizontal laminar flow systems are also used, where air moves from a filtered wall to an exhaust wall. While significantly more expensive to build and operate due to the large filter area and high air-change rates, laminar flow is non-negotiable for processes like microchip fabrication where a single sub-micron particle can destroy a device.

UNESCO Nomenclature: 2210
– Mechanics

Type

Physical Device

Disruption

Revolutionary

Usage

Widespread Use

Precursors

  • principles of fluid dynamics (Bernoulli’s principle, Reynolds number)
  • development of HEPA filtration technology
  • Willis Whitfield’s invention of the modern cleanroom
  • understanding of airborne particle transport mechanisms

Applications

  • semiconductor photolithography bays
  • sterile filling lines in pharmaceutical production
  • operating theaters for sensitive surgeries
  • satellite assembly and integration facilities
  • biological safety cabinets

Patents:

  • US3158457A

Potential Innovations Ideas

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Related to: laminar flow, turbulent flow, unidirectional airflow, contamination control, cleanroom design, fluid dynamics, HEPA filter, particle removal.

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Historical Context

(if date is unknown or not relevant, e.g. "fluid mechanics", a rounded estimation of its notable emergence is provided)

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