洁净室利用两种主要气流原理来控制污染。紊流（或非单向）涉及混合气流，适用于不太严格的等级（ISO 6-9）。层流（或单向）气流采用平行、恒速气流将颗粒从环境中排出，对 ISO 1-5 等高纯度应用至关重要，可防止交叉污染并确保快速清除颗粒。
洁净室气流原理：层流和紊流
1960
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The choice between turbulent and laminar airflow is a fundamental design decision in cleanroom engineering, driven by the required cleanliness level and cost constraints. Turbulent flow rooms, the more conventional design, supply HEPA-filtered air from ceiling-mounted diffusers. The air enters the room, mixes with the existing air, and removes contaminants as it exits through low-level exhausts. While effective for many applications, the random air currents can create eddies where particles may linger or settle.
In contrast, laminar flow, also known as unidirectional flow, creates a predictable, uniform movement of air. In a vertical laminar flow room, the entire ceiling is composed of HEPA or ULPA filters, and the air travels straight down to a perforated raised floor, acting like a massive, slow-moving piston that pushes particles out. This design provides the highest level of air cleanliness by minimizing the time a particle can remain airborne and preventing lateral movement of contaminants. Horizontal laminar flow systems are also used, where air moves from a filtered wall to an exhaust wall. While significantly more expensive to build and operate due to the large filter area and high air-change rates, laminar flow is non-negotiable for processes like microchip fabrication where a single sub-micron particle can destroy a device.
UNESCO Nomenclature: 2210
- 机械
类型
物理设备
中断
革命
使用方法
广泛使用
前体
- principles of fluid dynamics (Bernoulli’s principle, 雷诺数)
- development of HEPA filtration technology
- Willis Whitfield’s invention of the modern cleanroom
- understanding of airborne particle transport mechanisms
应用
- semiconductor photolithography bays
- sterile filling lines in pharmaceutical production
- operating theaters for sensitive surgeries
- satellite assembly and integration facilities
- 生物安全柜
专利：
- US3158457A
潜在的创新想法
Related to: laminar flow, turbulent flow, unidirectional airflow, contamination control, cleanroom design, fluid dynamics, HEPA filter, particle removal.
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历史背景
(如果日期不详或不相关，例如 "流体力学"，则对其显著出现的时间作了四舍五入的估计）。
相关发明、创新和技术原理
