High-Efficiency Particulate Air (HEPA) and Ultra-Low Particulate Air (ULPA) filters are critical cleanroom components. A HEPA filter must remove at least 99.97% of airborne particles 0.3 micrometers (µm) in diameter. An ULPA filter is even more efficient, removing 99.999% of particles 0.12 µm or larger. They work via a combination of interception, impaction, and diffusion.
