Sensofar Metrology

Spain

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Sensofar Metrology (Sensofar-Tech, S.L.) was founded in 2001 as a spin-off from the Universitat Politècnica de Catalunya (CD6) and the University of Barcelona. Headquartered in Terrassa (Barcelona), Spain, the company is a global manufacturer of non-contact 3D optical surface profilers and automated metrology equipment.

Sensofar operates international sales and support subsidiaries across Asia (China, South Korea, India, Taiwan, Japan), Europe (Germany, UK), and North America (United States). The company’s technology is used worldwide in precision manufacturing, semiconductor fabrication, materials research, and medical device verification, adhering to international surface texture standards such as ISO 25178.

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Sensofar develops proprietary optical profiling systems based on multimodal sensor architectures combining three complementary measurement techniques in a single optical head:

Core Optical Profiling Technologies: Confocal microscopy (for critical dimensions with high lateral and vertical resolution), Phase Shifting & White Light Interferometry (for sub-nanometer surface roughness), Focus Variation (for steep slopes and form characterization), and Spectroscopic Reflectometry (for transparent thin-film thickness measurements).
Instrumentation Systems: S neox (flagship 3-in-1 3D optical surface profiler), S wide (large-area 3D optical profiler utilizing fringe projection), S neox Five Axis (integrates a high-precision motorized rotational module with optical scanning for complete 3D volumetric inspection), and S onix (automated non-contact metrology system for cleanroom in-line inspection).
Software & Analysis: SensoSCAN (system acquisition and motion control software) and SensoMAP (comprehensive 3D surface topography analysis and geometric difference evaluation compared to CAD models).
Consultancy & Metrology Services: Custom optical metrology engineering, sample characterization, and metrology consultancy for industrial QA/QC laboratories.

Sensofar Metrology

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