Latest Publications on MEMS
This is our latest selection of worldwide publications on MEMS, between many scientific online journals, classified and focused on MEMS.
Tip: Further to this selection on MEMS, you can search and filter our > publication database < by author, topic, keywords, date or journal.
Analysis of Structural Design Variations in MEMS Capacitive Microphones
On 2025-02-02 by Tzu-Huan Peng, Huei-Ju Hsu, Jin H. Huang @MDPI
Keywords: structural design, MEMS capacitive microphones, microstructures, equivalent circuit models, Finite Element Analysis (FEA)
AI summary: Different microstructures impact acoustic performance. Several microstructures analyzed, including rib-reinforced backplates, suspended diaphragms, and outer vent holes. Equivalent circuit models simulated sensitivity, SNR, and LCF. FEA used for acoustic damping, mechanical parameters, and pre-deformation analysis.
Abstract: Different microstructures significantly affect the acoustic performance of MEMS capacitive microphones, particularly in key specifications of interest. This paper presents several microstructures, including rib-reinforced backplates, suspended diaphragms, and outer vent holes. Three MEMS microphone designs were implemented to analyze the impact of these microstructures. Equivalent circuit models corresponding to each design were constructed to simulate specifications such as sensitivity, signal-[...]
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An Analysis of Arrays with Irregular Apertures in MEMS Smart Glasses for the Improvement of Clear View
On 2025-01-31 by Roland Donatiello, Mustaqim Siddi Que Iskhandar, Md Kamrul Hasan, Philipp Kstner, Muhammad Hasnain Qasim, Jiahao Chen, Shilby Baby, Basma Elsaka, Guilin Xu, Hartmut Hillmer @MDPI
Keywords: MEMS, smart glasses, irregular apertures, clear view, arrays
AI summary: Innovative MEMS technology for smart glasses with irregular apertures improves view quality. Reduction in optical artifacts through irregular apertures enhances clarity. Comprehensive study includes design, simulation, fabrication, and analysis. Improved energy management and daylight steering in buildings with MEMS glass technology.
Abstract: An innovative glass substrate surface technology including integrated micro-electro-mechanical systems (MEMS) is presented as an advanced light modulation, heat control, and energy management system. This smart technology is based on millions of metallic micromirrors per square meter fabricated on the glass surface, which are arranged in arrays and electrostatically actuated. The smart window application exploits an elaborate MEMS glass technology for active daylight steering and energy manageme[...]
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Modeling and Analysis of Vibration Coupling in Differential Common-Based MEMS Resonators
On 2025-01-30 by Jing Zhang, Zhuo Yang, Tianhao Wu, Zhichao Yao, Chen Lin, Yan Su @MDPI
Keywords: Vibration coupling, MEMS resonators, Finite element simulation, Differential common-based, Sensor performance
AI summary: Modeling vibration coupling in differential MEMS resonators, Analyzing coupling phenomena in resonators, Experimental test system for characterization, Optimizing device designs with theoretical foundation.
Abstract: In differential MEMS resonant sensors, a pair of resonators are interconnected with other structural components while sharing a common substrate. This leads to mutual coupling of vibration energy between resonators, interfering with their frequency outputs and affecting the sensor&rsquo;s static performance. This paper aims to model and analyze the vibration coupling phenomena in differential common-based MEMS resonators (DCMR). A mechanical model of the DCMR structure was established an[...]
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Homogeneity of Electro-Mechanical and Optical Characteristics in Ring-Shaped MEMS Shutter Arrays with Subfield Addressing for Interference Microscopy
On 2025-01-30 by Philipp Kstner, Basma Elsaka, Mustaqim Siddi Que Iskhandar, Steffen Liebermann, Roland Donatiello, Shujie Liu, Hartmut Hillmer @MDPI
Keywords: homogeneity, electro-mechanical, optical characteristics, MEMS, interference microscopy
AI summary: MEMS array-based approach for micro-irises using subfield addressing. Experimental study on homogeneity of characteristics in ring-shaped shutter arrays. Measurement data confirms crosstalk-free operation. Evaluation shows stable performance with fast response times.
Abstract: We present a MEMS array-based approach for micro-irises called &ldquo;ring shutter&rdquo;, utilizing subfield addressing for applications in advanced micro-optics, such as interference microscopy. This experimental study is focused on investigating the homogeneity of electro-mechanical and optical characteristics within and between subfields of a lab demonstrator device. The characterization aims to ensure crosstalk-free and swift optical performance, as demonstrated in a previou[...]
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Capacitance–Voltage Studies on Electrostatically Actuated MEMS Micromirror Arrays
On 2025-01-29 by Jiahao Chen, Xiaohui Yang, Mustaqim Siddi Que Iskhandar, Md. Kamrul Hasan, Shilby Baby, Muhammad Hasnain Qasim, Dennis Lber, Shujie Liu, Roland Donatiello, Steffen Liebermann, Guilin Xu, Hartmut Hillmer @MDPI
Keywords: Capacitance, Voltage, Electrostatic actuation, MEMS, Micromirror arrays
AI summary: Study of capacitive-voltage performance on electrostatically actuated MEMS micromirror arrays. Analysis of hinge parameters, initial tilt angles, and materials on system efficiency. Increase in Young’s modulus and tilt angles result in higher threshold voltages.
Abstract: This article presents the electrostatic actuation performance of micromirror arrays for intelligent active daylight control and energy management in green buildings using a capacitive&ndash;voltage (C-V) measurement technique. In order to understand how geometric hinge parameters, initial opening angles, and materials affect the overall efficiency and functionality of the system, micromirror arrays have been analyzed using C-V measurements considering (i) full and broken hinge structures[...]
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Analysis of Collapse–Snapback Phenomena in Capacitive Micromachined Ultrasound Transducers
On 2025-01-29 by Chlo Halbach, Veronique Rochus, Jan Genoe, Xavier Rottenberg, David Cheyns, Paul Heremans @MDPI
Keywords: collapse, snapback, capacitance-voltage, COMSOL Multiphysics, LDV
AI summary: Analysis of collapse and snapback phenomena in CMUTs using C-V sweeps, demonstration of dynamic capacitances in the effective C-V curve, observation of collapse-snapback phenomena during measurements, transient membrane behavior affects MEMS capacitance-voltage characteristics.
Abstract: The pull-in and pull-out voltages are important characteristics of Capacitive Micromachined Ultrasound Transducers (CMUTs), marking the transition between conventional and collapse operation regimes. These voltages are commonly determined using capacitance&ndash;voltage (C-V) sweeps. By modeling the operating conditions of an LCR meter in COMSOL Multiphysics&reg;, we demonstrate that the measured capacitance comprises both static and dynamic capacitances, with the dynamic capacit[...]
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